High-Vacuum Inline Filters
Capture oil, oil vapor, and other contaminants from your pump to prevent them from spreading into your high-vacuum system with these filters. When it's time to replace the filter element, you don't need tools to access it; undo the quick-release clamp to open the filter body. Filters have a drain port to remove collected oil.
Filters with quick-clamp connections (also known as KF, NW, and QF fittings) require a quick clamp and a ring (both sold separately) for each connection.
Filters with claw-clamp connections (also known as ISO-K fittings) will connect to larger components than filters with quick-clamp connections. Use four claw clamps and a ring (all sold separately) to secure each connection. Double-claw clamps attach to the grooves on the fittings. Single-claw clamps have a clamp on one end and an exposed bolt on the other. Thread the bolt-end directly into the body of pumps, valves, or other high-vacuum components.
For technical drawings and 3-D models, click on a part number.
Inline Filters | |||||||||||||
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O'all | Replacement Elements | ||||||||||||
High-Vacuum Flange Size | Flange OD | For Tube OD | Max. Flow Rate | High Vacuum Connection Type | Max. Vacuum | Max. Temp., °F | Lg. | Dia. | Removes Particle Size Down To, microns | Each | Each | ||
Quick-Clamp Connection—304 Stainless Steel Housing | |||||||||||||
16 | 1.18" | 3/4" | 50 scfm @ 14.7 psi | ISO-KF | 1 × 10 -3 torr @ 72° F | 300° | 11 1/4" | 4" | 0.2 | 0000000 | 0000000 | 0000000 | 000000 |
25 | 1.57" | 1" | 50 scfm @ 14.7 psi | ISO-KF | 1 × 10 -3 torr @ 72° F | 300° | 11 1/4" | 4" | 0.2 | 0000000 | 000000 | 0000000 | 00000 |
40 | 2.16" | 1 1/2" | 100 scfm @ 14.7 psi | ISO-KF | 1 × 10 -3 torr @ 72° F | 300° | 11 1/4" | 6 1/4" | 0.2 | 0000000 | 000000 | 0000000 | 000000 |
50 | 2.95" | 2" | 100 scfm @ 14.7 psi | ISO-KF | 1 × 10 -3 torr @ 72° F | 300° | 11 1/4" | 6 1/4" | 0.2 | 0000000 | 000000 | 0000000 | 000000 |
50 | 2.95" | 2" | 200 scfm @ 14.7 psi | ISO-KF | 1 × 10 -3 torr @ 72° F | 300° | 11 1/2" | 7 7/8" | 0.2 | 0000000 | 00000000 | 0000000 | 000000 |
Claw-Clamp Connection—304 Stainless Steel Housing | |||||||||||||
63 | 3.74" | 2 1/2" | 200 scfm @ 14.7 psi | ISO-K | 1 × 10 -3 torr @ 72° F | 300° | 11 1/2" | 7 7/8" | 0.2 | 0000000 | 00000000 | 0000000 | 000000 |
For High-Vacuum Flange Size | For Flange OD | For Tube OD | High Vacuum Connection Type | Material | Max. Vacuum | Each | |
Quick-Clamp Connection—Clamp with Wing Nut | |||||||
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10, 16 | 1.18" | 1/2", 3/4" | ISO-KF | Aluminum | 1 × 10 -7 torr @ 72° F | 00000000 | 00000 |
25 | 1.57" | 1" | ISO-KF | Aluminum | 1 × 10 -7 torr @ 72° F | 0000000 | 00000 |
40 | 2.16" | 1 1/2" | ISO-KF | Aluminum | 1 × 10 -7 torr @ 72° F | 0000000 | 00000 |
50 | 2.95" | 2" | ISO-KF | Aluminum | 1 × 10 -7 torr @ 72° F | 0000000 | 00000 |
Claw-Clamp Connection—Double-Claw Clamp with Bolt | |||||||
63, 80, 100 | 3.74", 4.33", 5.12" | 2 1/2", 3", 4" | ISO-K | Aluminum | 1 × 10 -9 torr @ 72° F | 0000000 | 0000 |
Claw-Clamp Connection—Single-Claw Clamp with Bolt | |||||||
63, 80, 100 | 3.74", 4.33", 5.12" | 2 1/2", 3", 4" | ISO-K | Aluminum | 1 × 10 -9 torr @ 72° F | 0000000 | 0000 |
Material | |||||||||
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For High-Vacuum Flange Size | For Flange OD | For Tube OD | High Vacuum Connection Type | O-Ring | Inner Ring | Max. Vacuum | Max. Temp., °F | Each | |
Quick-Clamp Connection | |||||||||
16 | 1.18" | 3/4" | ISO-KF | Fluoroelastomer Rubber | 304 Stainless Steel | 1 × 10 -7 torr @ 72° F | 300° | 00000000 | 00000 |
25 | 1.57" | 1" | ISO-KF | Fluoroelastomer Rubber | 304 Stainless Steel | 1 × 10 -7 torr @ 72° F | 300° | 0000000 | 00000 |
40 | 2.16" | 1 1/2" | ISO-KF | Fluoroelastomer Rubber | 304 Stainless Steel | 1 × 10 -7 torr @ 72° F | 300° | 0000000 | 00000 |
50 | 2.95" | 2" | ISO-KF | Fluoroelastomer Rubber | 304 Stainless Steel | 1 × 10 -7 torr @ 72° F | 300° | 0000000 | 00000 |
Claw-Clamp Connection | |||||||||
63 | 3.74" | 2 1/2" | ISO-K | Viton® Fluoroelastomer Rubber | 304 Stainless Steel | 1 × 10 -9 torr @ 72° F | 400° | 0000000 | 00000 |